Discovering and reducing defects in MIM capacitors

摘要

Integrated circuit defectivity is becoming a top concern for Reliability Engineers and their customers. Device lifetimes and times to wearout are less important compared to the experience of an early or infant failure in the warranty period. Defects in circuit elements, such as capacitors, are as important as any other cause of device fallout. Historically, integrated capacitors have been a leading reason for early failure, so this work describes the detection, root cause analysis, and the mitigation of three types of capacitor defects.