Fault localisation in ICs by goniometric laser probing of thermal induced surface waves

摘要

New methods for fault detection in ICs are needed due to new technological trends. The detection of heat genreated by faults offlts offers interesting perspectives in this respect. Periodic heat released at surface or inside ICs genertes a surface thermal wave that can be detected by appropriate laser probing at distances up t o 500μm from the source. We propose in thi spaper a goniometric laser probing method allowing the determination of the direction and distance of a fault wiht respect to the probing point.