首页> 外文期刊>Microelectronics reliability >Molecular dynamic study for concentration-dependent volume relaxation of vacancy
【24h】

Molecular dynamic study for concentration-dependent volume relaxation of vacancy

机译:浓度依赖性体积松弛的分子动力学研究

获取原文
获取原文并翻译 | 示例
获取外文期刊封面目录资料

摘要

In this paper, large-scale molecular dynamic (MD) simulation is performed to investigate the concentrationdependent vacancy volume relaxation in Al, Cu, and Au, respectively. The vacancy volume relaxation factor is calculated and correlated to the microstructure change based on MD results. It is found that the vacancy volume relaxation factor is nearly a constant at low to mid-vacancy concentration level, i.e., from 10-6 to 10-3 of the lattice concentrations. However, the volume of vacancies will completely collapse at the high vacancy concentration, and the coalescence of vacancies will form massive dislocations. The simulation results are in good agreement with the existing data from both experiments and simulations in the literature. A uniform empirical equation is developed to obtain the vacancy volume relaxation factor as a function of vacancy concentration. Furthermore, the hydrostatic stress is also calculated based on MD simulations. This paper also discusses the relationship between the vacancy volume relaxation and the diffusion-induced strain, such as in the application of electromigration. For a constrained condition, the hydrostatic stresses obtained from MD-based vacancy volume relaxation and a commonly used stress-vacancy equation are compared. An insight on the critical vacancy concentration at which electromigration failure would occur is discussed in detail.
机译:在本文中,进行大规模分子动态(MD)模拟,以分别研究Al,Cu和Au的浓度依赖性空位弛豫。基于MD结果计算空位体积弛豫系数并与微观结构变化相关。发现空位体积弛豫系数几乎是恒定空位浓度水平的恒定,即晶格浓度的10-6至10-3。然而,空位量将完全崩溃,空位浓度高,并且空位的聚结会形成巨大的脱位。仿真结果与文献中的实验和模拟的现有数据吻合良好。开发了统一的经验方程,以获得作为空位浓度的函数的空位体积弛豫系数。此外,还基于MD仿真计算静水压应力。本文还讨论了空位体积弛豫和扩散诱导的应变之间的关系,例如在电迁移中的应用。对于受限制的病症,比较了由MD的空位体积弛豫和常用的应力空位方程获得的静水压应力。详细讨论了对临界空位浓度的临界空位浓度的见解。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号