Correlative microscopy workflow for precise targeted failure analysis of multi-layer ceramic capacitors

摘要

The correlative framework includes three-dimensional X-ray tomography, femto-second laser micro machining, three-dimensional FIB/SEM/EDS tomography, and data segmentation. This framework is highly efficient allowing non-destructive locating of the defect and nanometer precise targeting with communication between instruments. The analyses resulted in a fully segmented three-dimensional data set revealing a failure mode of leakage due to suspended metal within the dielectric material.