Sensitivity and reliability enhancement of a MEMS based wind speed sensor

摘要

This paper describes shape modification of microcantilever to enhance the sensitivity and reliability of a MEMS based wind speed sensor. Finite element analysis simulations with COMSOL and the experimental results have been compared to evaluate the performance of the fabricated sensor. The sensitivity is increased with modified structure to 108.46 mu V/V-ms(-1). Use of full cut stress concentration regions results in substantial increase of nearly four times the sensitivity of a simple rectangular paddle microcantilever. Introducing fillets at the paddle-cantilever junction resulted in improved reliability.