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Development of high-strength and superior thermal shock-resistant GaN/ DBA die attach structure with Ag sinter joining by thick Ni metallization

机译:通过厚厚的镍金属化进行银烧结连接的高强度,优异的抗热震性GaN / DBA芯片连接结构的开发

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摘要

With the advent of wide band-gap (WBG) semiconductors like silicon carbide (SiC) and gallium nitride (GaN), the operation temperature of WBG power modules are expected to be over 250 degrees C. High temperature die-attach materials that can withstand these harsh conditions are emerging as one of the main issues of the reliability of power electronic applications. In this study, high-strength and superior thermal shock-resistant GaN/DBA die attach structures with Ag sinter joining by thick Ni metallization (7 gm) were developed and compared to conventional Pb-5Sn soldering die attach. A thermal shock test was conducted at a temperature range of -50/250 degrees C, holding 30 min at each extreme temperature up to 500 cycles. Consequently, the shear strength of the Ag sinter joining structure was sustained above the initial strength after 500 cycles, which showed durable sinter necks and non-deformed interfaces due to the thick Ni metallization. On the other hand, the Pb-5Sn solder joined structure showed a 50% reduction in shear strength after 500 cycles compared to the initial state. Some disadvantages of these solder joints occurred such as an intermetallic compound and interface degradation. Thus, with the new design and evaluation reported in this study, Ag sinter joining can be expected as an environment-friendly replacement die material for the long-term reliability of WBG semiconductor module packaging.
机译:随着诸如碳化硅(SiC)和氮化镓(GaN)之类的宽带隙(WBG)半导体的出现,WBG电源模块的工作温度有望超过250摄氏度。可以承受的高温芯片连接材料这些恶劣条件正成为电力电子应用可靠性的主要问题之一。在这项研究中,开发了具有高强度和优异的抗热震性的GaN / DBA晶粒附着结构,该结构具有通过厚镍金属化(7 gm)进行Ag烧结连接的工艺,并将其与传统的Pb-5Sn焊接晶粒附着进行比较。在-50/250摄氏度的温度范围内进行热冲击测试,在每个极端温度下(最多500个循环)保持30分钟。因此,经过500次循环后,Ag烧结接合结构的剪切强度保持在初始强度以上,这表明由于厚厚的Ni金属化,烧结颈变得牢固且界面未变形。另一方面,与初始状态相比,经过500次循环后,Pb-5Sn焊料接合结构的剪切强度降低了50%。这些焊点出现了一些缺点,例如金属间化合物和界面退化。因此,通过本研究报告的新设计和评估,可以期望将Ag烧结接合作为一种环保替代模具材料,以实现WBG半导体模块封装的长期可靠性。

著录项

  • 来源
    《Microelectronics & Reliability》 |2019年第9期|113380.1-113380.7|共7页
  • 作者单位

    Osaka Univ Grad Sch Engn Dept Adapt Machine Syst Osaka Japan|Osaka Univ Inst Sci & Ind Res Ibaraki 5670047 Japan;

    Osaka Univ Inst Sci & Ind Res Ibaraki 5670047 Japan;

    Hyundai Mobis Co Ltd Power Convers Engn Team Yongin 449912 South Korea;

    Osaka Univ Joining & Welding Res Inst Ibaraki 5670047 Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
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