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Analysis of the degradation mechanisms occurring in the topside interconnections of IGBT power devices during power cycling

机译:功率循环期间IGBT功率器件的顶部互连中发生的劣化机理分析

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This paper presents an experimental technique to characterize the damage evolution of the topside interconnections of power semi-conductor devices during power cycling tests. DC power cycling tests are done on Semikron SKIM 63 power modules, a solder-free module with silver sintered chips, ensuring the degradations to appear in the top layers only. The cycled substrates are then extracted from the test bench at different steps of the aging for analysis. Four-probe measurements are implemented on the chips so that the evolution of physical parameters representative of the degradation in the metallization and the bond wire contacts can be obtained. Finally, optical microscopy analysis of cross-sections at the wire bond contact interface is carried out to corroborate the electrical measurements to the crack length growth after specific aging intervals.
机译:本文提出了一种实验技术来表征功率半导体器件在功率循环测试过程中顶部互连的损伤演变。直流电源循环测试是在Semikron SKIM 63电源模块上完成的,该模块是带有银烧结芯片的无焊模块,可确保降级仅出现在顶层。然后在老化的不同步骤从测试台中提取循环的底物以进行分析。在芯片上执行四探针测量,以便获得代表金属化和键合线接触点退化的物理参数的演变。最后,对线键合接触界面处的横截面进行了光学显微镜分析,以证实在特定的时效间隔后,电子测量结果与裂纹长度的增长有关。

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