Accurate silicon dummy structure model for nonlinear microwave FinFET modeling

摘要

The dummy test structures based de-embedding techniques allow one to quickly subtract out part of the parasitic contributions from the microwave transistor measurements without the need of explicit determination of the associated circuit model. But this means that the problem of determining the complex network representing the dummy structures is only by-passed rather than solved. Consequently, this paper is aimed at extracting accurate lumped element models for silicon "open" and "short" structures in order to extend the nonlinear microwave modeling of on-wafer FinFETs at the calibration plane corresponding to the probe tips without need of any shift of the reference plane.