Heteroepitaxial growth of Pb(Mg_(1/3)Ta_(2/3))O_3 thin films on SrTiO_3 substrates using chemical solution deposition method: microstructural evolution

摘要

Epitaxial Pb(Mg_(1/3)Ta_(2/3))O_3 (PMT) thin films were grown on (001) SrTiO_3 (STO) substrates using a chemical solution deposition method. Microstructural evolution as a function of annealing temperatures (600～900℃/1 h) has been studied using transmission electron microscopy, scanning electron microscopy, and four-circle X-ray diffractometry. A thin layer of epitaxial perovskite phase was formed first at the film/substrate interface in a sample annealed at 650 ℃/1 h and then it grew upward to the film surface by consuming the pyrochlore phase in the upper region of the film. No further microstructural evolution was observed in the sample annealed at above 750 ℃/1 h. An epitaxial orientation relationship of [100](001)_(PMT)||[100](001)_(STO) was found by selected area diffraction pattern.