A novel optical gas sensor based on sputtered In_xO _yN_z films with gold-nano-dots

摘要

In this paper we present new results achieved with a sputtered multilayer system consisting of In_xO _yN_z and gold-nano-dots. This system shows not only electrical but also optical gas sensitivity. The optical sensing effect is enhanced by the gold-nano-dots which are randomly distributed on and inside each In_xO _yN_z layer. The optical measuring system consists of a tuneable light source (or alternatively of a simple light emitting diode) and a CdS-photoresistor. As an example of the optical gas sensing effect we show the sensitivity to hydrogen at a temperature of 400℃.