Fabrication of conductometric chemical sensors by photolithography of conductive polymer composites

摘要

A new approach based on photolithographic processes for the fabrication of conductive polymer chemical sensors is described. The process was successfully applied in polymer/carbon black composites of the negative tone EPR and PDMS, and allows for the exact positioning and patterning of the composite polymer over the electrodes. On the other hand, patterning of a positive tone composite (PMMA) proved unsuccessful for a wide range of exposure doses and developer schemes. Responses to the absorption of selected vapors with emphasis on the EPR/carbon black system are reported.