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首页> 外文期刊>Microelectronic Engineering >Atomic structure analysis of self-assembled ErSi_2 nanowires formed on Si substrates
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Atomic structure analysis of self-assembled ErSi_2 nanowires formed on Si substrates

机译:硅衬底上自组装的ErSi_2纳米线的原子结构分析

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摘要

ErSi_2 nanowires were fabricated on Si(110) substrates by a self-assembled growth process without a high vacuum systems. All the nanowires were highly parallel and along the Si< 011 > direction. It was shown by structural investigations that the nanowires consisted of two types, which showed a similar surface morphology. The first type was ErSi_2 nanowires buried into the Si substrate, and the other was ErSi_2 thin layers covering on wire-like Si surface. The later may be the remained structure after evaporation of the first type during the high temperature annealing.
机译:ErSi_2纳米线是在没有高真空系统的情况下通过自组装生长工艺在Si(110)衬底上制造的。所有纳米线都是高度平行的并且沿着Si <011>方向。通过结构研究表明,纳米线由两种类型组成,它们显示出相似的表面形态。第一类是埋在Si衬底中的ErSi_2纳米线,另一类是覆盖在线状Si表面的ErSi_2薄层。后者可能是高温退火过程中第一种蒸发后的残留结构。

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