A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications

摘要

A photonic wire Bragg grating structure, integrated with fluidic channels and reservoirs for fluid sensing based on refractive index changes, has been designed using 3-D Finite Domain Time Difference (FDTD) method and fabricated using electron beam lithography and reactive ion etching on an Silicon-on-lnsu-lator (SOI) material. A scheme is developed where a Polydimethylsiloxane (PDMS) microfluidic chip is integrated with the SOI photonic chip via a reversible active sealing method. The highest sensitivity (An/AA.) of the device is estimated to be 5.5 × 10~(-3)nm~(-1) and the volume of the sensing region is approximately 2 μm~3. This device could be a potential candidate for lab-on-a-chip devices for bio-sensing applications.