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首页> 外文期刊>Microelectronic Engineering >Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating
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Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating

机译:使用逐步旋转光刻和化学镀镍技术在金属辊上直接制造微结构

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摘要

Roller embossing has attracted more attention in recent years due to its rapid and continuous process for mass production. The fabrication of roller is a challenge due to microstructures on the curved surface. This paper proposes a method of fabricating roller mold with microstructures on the surface using novel stepped rotating lithography and electroless nickel plating. The results prove that the microstructures can be successfully fabricated onto the metal roller using the proposed procedure. In this study, the roller with micro-grooves whose average height is 1.1 μm and widths are 23 and 45 μm have been successfully fabricated.
机译:辊压纹由于其快速且连续的批量生产过程而引起了越来越多的关注。由于弯曲表面上的微结构,辊子的制造是一个挑战。本文提出了一种利用新颖的步进旋转光刻技术和化学镀镍方法在表面上形成具有微结构的辊子模具的方法。结果证明,使用所提出的程序可以将微结构成功地制造到金属辊上。在这项研究中,已经成功制造了具有微槽的辊,该辊的平均高度为1.1μm,宽度为23和45μm。

著录项

  • 来源
    《Microelectronic Engineering》 |2009年第6期|615-618|共4页
  • 作者单位

    Department of Mechanical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 106, Taiwan;

    Department of Mechanical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 106, Taiwan;

    Department of Mechanical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 106, Taiwan;

    Department of Mechanical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 106, Taiwan;

    Department of Mechanical Engineering, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei 106, Taiwan Industrial Technology Research Institute, Hsinchu 310, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    dip coating; microstructures; electroless nickel plating; stepped rotating lithography;

    机译:浸涂微观结构化学镀镍;步进旋转光刻;

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