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机译:通过软紫外纳米压印光刻技术在陶瓷薄膜和硅基板上制备纳米级图案
Department of Applied Physics and Materials Research Centre, The Hong Kong Polytechnic University, Hung Horn, Kowloon, Hong Kong, China;
Department of Applied Physics and Materials Research Centre, The Hong Kong Polytechnic University, Hung Horn, Kowloon, Hong Kong, China;
Department of Applied Physics and Materials Research Centre, The Hong Kong Polytechnic University, Hung Horn, Kowloon, Hong Kong, China;
Department of Applied Physics and Materials Research Centre, The Hong Kong Polytechnic University, Hung Horn, Kowloon, Hong Kong, China;
Department of Applied Physics and Materials Research Centre, The Hong Kong Polytechnic University, Hung Horn, Kowloon, Hong Kong, China;
Department of Applied Physics and Materials Research Centre, The Hong Kong Polytechnic University, Hung Horn, Kowloon, Hong Kong, China Ecole Normale Superieure, Departement de Chimie, 24 rue Lhomond, 75231 Paris Cedex, France;
photonic crystals; ferroelectric materials; nanoimprint lithography;
机译:使用紫外线纳米压印光刻技术进行纳米图案掺杂mar的氧化铈薄膜的形状控制制备
机译:使用溶胶-凝胶法和纳米压印光刻技术制造表面图案化的ZnO薄膜
机译:使用溶胶-凝胶法和纳米压印光刻技术制造表面图案化的ZnO薄膜
机译:薄膜硅太阳能电池溶胶-凝胶涂层中光捕获图案的纳米压印光刻
机译:适用于大面积电子设备的低温硅薄膜:使用软光刻和通过顺序横向固化进行激光结晶的器件制造。
机译:通过软紫外-纳米压印光刻技术对图案化的Al薄膜进行退火处理大规模制造纳米图案化的蓝宝石衬底
机译:通过软紫外纳米压印光刻技术在陶瓷薄膜和硅基板上制备纳米级图案
机译:无需后烧制直接制备图案化功能陶瓷薄膜的软溶液加工。