Third-mode 48 MHz free-free beam resonator used as a RF balun

摘要

In this paper, we present a new functional MEMS device monolithically integrated in a CMOS technology which is capable to mechanically perform the function of a balun, i.e. convert electrical signals that are unbalanced (single ended) to balanced ones. The RF-MEMS device consists on a 3rd order lateral mode free-free beam with a 48 MHz resonance frequency. The resonator is electrically actuated and capaci-tively detected allowing a fully integrated system. Two electrode configurations allow the signal phase shift between the two outputs of the RF-CMOS-MEMS device.