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Selective alignment of a ZnO nanowire in a magnetic field for the fabrication of an air-gap field-effect transistor

机译:ZnO纳米线在磁场中的选择性排列,用于制造气隙场效应晶体管

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摘要

An air-gap field-effect transistor (FET) was prepared by selectively aligning a Ni-capped ZnO nanowire in a magnetic field on a pre-fabricated electrode patterns formed by lithography. It was demonstrated that the magnetic alignment technique could be applied effectively to the fabrication of air-gap nanowire FETs with desired circuit configurations. This device showed operational characteristic strongly dependent on the possible surface adsorbates originating from the negatively charged oxygen related species, as compared to the back-gate nanowire FET separately prepared for comparison. These results will illuminate the prospect of realizing producible matrix-type devices based on one-dimensional nanostructures such as logic circuits and biochemical sensors.
机译:通过在磁场中选择性地将镍覆盖的ZnO纳米线对准在通过光刻形成的预制电极图案上,来制备气隙场效应晶体管(FET)。结果表明,磁对准技术可以有效地应用于具有所需电路配置的气隙纳米线FET的制造。与单独准备用于比较的背栅纳米线FET相比,该器件的工作特性在很大程度上取决于源自带负电荷的氧相关物质的表面吸附物。这些结果将阐明实现基于一维纳米结构的可生产矩阵型设备的前景,例如逻辑电路和生化传感器。

著录项

  • 来源
    《Microelectronic Engineering》 |2010年第1期|10-14|共5页
  • 作者单位

    Information and Electronic Materials Research Laboratory, Department of Materials Science and Engineering, Yomei University, 134 Shinchon-dong,Seodaemun-gu, Seoul 120-749, Republic of Korea;

    Information and Electronic Materials Research Laboratory, Department of Materials Science and Engineering, Yomei University, 134 Shinchon-dong,Seodaemun-gu, Seoul 120-749, Republic of Korea Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA;

    Information and Electronic Materials Research Laboratory, Department of Materials Science and Engineering, Yomei University, 134 Shinchon-dong,Seodaemun-gu, Seoul 120-749, Republic of Korea;

    School of Nano and Advanced Materials Engineering, Changwon National University, 9 Sarim-dong, Changwon, Cyoungnam 641-773, Republic of Korea;

    Information and Electronic Materials Research Laboratory, Department of Materials Science and Engineering, Yomei University, 134 Shinchon-dong,Seodaemun-gu, Seoul 120-749, Republic of Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    ZnO nanowire; field-effect transistor; air-gap structure; magnetic alignment;

    机译:ZnO纳米线;场效应晶体管气隙结构;磁对准;

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