Performance of a multi-electrode silicon-based dielectrophoretic cage device using four electrical contacts

摘要

A dielectrophoretic (DEP) cage [1] device was built entirely on a silicon substrate using standard CMOS processing techniques. The signal phases on multiple electrodes are controlled with only four electrical contacts, which connect to the device using three metal layers. A correlation between the particle velocities and the electric field squared gradients was made using Tracker [2], an open source program that tracks particles in video files, and COMSOL Multiphysics~®, which solves the Laplace equation for the corresponding electric field squared gradients using finite element analysis.