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Direct imprinting on a polycarbonate substrate with a compressed air press for polarizer applications

机译:用压缩空气压力机直接印刷在聚碳酸酯基板上,用于偏光片应用

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摘要

In this study, simple two-step processes were used to fabricate the wire-grid polarizer (WGP) on a polycarbonate (PC) sheet. The PC gratings were fabricated by direct imprinting of the PC sheet onto a silicon mold with a compressed air press (CAP). No additional imprinted polymer was required in the imprinting step. The applied pressure of 5 bar was much lower than the pressure reported in the literature, which was due to the use of the CAP. The WGP was further fabricated with an oblique aluminum (Al) sputtering on the PC grating. The rigorous coupled-wave analysis (RCWA) was performed to explain and verify the experimental results. The fabricated WCP should have potential application in the infrared region.
机译:在这项研究中,使用简单的两步过程在聚碳酸酯(PC)片材上制造线栅偏振器(WGP)。通过使用压缩空气压力机(CAP)将PC板直接压印到硅模具上来制造PC光栅。在压印步骤中不需要额外的压印聚合物。 5 bar的施加压力远低于文献报道的压力,这是由于使用了CAP。通过在PC光栅上倾斜铝(Al)溅射进一步制造WGP。进行了严格的耦合波分析(RCWA)来解释和验证实验结果。制成的WCP应该在红外区域具有潜在的应用。

著录项

  • 来源
    《Microelectronic Engineering》 |2011年第8期|p.2026-2029|共4页
  • 作者单位

    Institute of Electro-Optical Science and Engineering. National Cheng Kung University, Tainan 701, Taiwan;

    Institute of Electro-Optical Science and Engineering. National Cheng Kung University, Tainan 701, Taiwan;

    Institute of Electro-Optical Science and Engineering. National Cheng Kung University, Tainan 701, Taiwan;

    Department of Mechanical Engineering. National Kaohsiung University of Applied Sciences, Kaohsiung 807, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    nanoimprint; compressed air press; polycarbonate; flexible substrate; wire-grid polarizer;

    机译:纳米压印压缩空气压制聚碳酸酯柔性基板线栅偏光片;

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