Design and fabrication of a novel flowmeter with corrugated structure

摘要

We designed, fabricated and evaluate the novel air flowmeter with corrugation structure for the detection of low air velocity. For measuring the low air flow rate, the sensitivity related factors, the air drag force and the output signal, should be improved at the given air flow. The device has the paddle structure, and the maximized air drag force is obtained with vertical air flow. The output signal is also improved with the corrugation structure and measured with piezoresistive detection. The low air flow rate with less than 1 m/s air velocity are applied, and the fabricated flowmeter with corrugation structure shows the better sensitivity and the response time than those of flat one. Various experiments about repeated measurements also show the stabilized signals.