Dielectrophoretic assembly of suspended single-walled carbon nanotubes

摘要

We report a detailed study of dielectrophoretic assembly of single-walled carbon nanotube (SWCNT) devices intended for nano electromechanical systems (NEMS) applications. The process conditions of dielectrophoresis (DEP) are optimized to maximize the yield of devices with only one SWCNT bridging the electrode structures. The frequency of the applied electric field and the concentration of the SWCNT dispersion were found to be important parameters for assembling single SWCNT per device site. Critical point drying (CPD) has been successfully used to avoid stiction of the assembled SWCNTs during the final drying and release step. Electrical measurements performed with the as-assembled nanotubes reveal the presence of both metallic and semiconducting SWCNTs.