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机译:用于高速SPM的微机械自致动压阻悬臂
Department of Microelectronic and Nanoelectronic Systems, Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoffstr. 1, 98684 llmenau, Germany;
Department of Microelectronic and Nanoelectronic Systems, Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoffstr. 1, 98684 llmenau, Germany;
Department of Microelectronic and Nanoelectronic Systems, Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoffstr. 1, 98684 llmenau, Germany;
Department of Microelectronic and Nanoelectronic Systems, Institute of Micro and Nanoelectronics, Ilmenau University of Technology, Gustav-Kirchhoffstr. 1, 98684 llmenau, Germany;
high-speed AFM; SPM; piezoresitive cantilever; bimetal actuation;
机译:用于纳米技术的压阻和自驱动128悬臂阵列
机译:压阻微加工悬臂中总电离剂量响应的掺杂类型和浓度依赖性
机译:压阻微加工悬臂中的总电离剂量效应
机译:自压式微悬臂阵列,具有压阻读数,可进行多参数识别
机译:硅压阻微加悬臂中电离辐射响应的机制
机译:具有屏蔽层的微机械压阻式压力传感器
机译:基于飞秒激光技术的散装微机械的4H-SiC压阻压力芯片的设计与制造
机译:批量微机械加工6H-siC高g压阻式加速度计制造和测试