Selected papers from the 20th European Workshop on Materials for Advanced Metallization 2011

摘要

The European Workshop on "Materials for Advanced Metallization 2011" for the first time was organized and held together as a joint conference with the "International Interconnect Technology Conference" (IITC).The IITC (International Interconnect Technology Conference) is sponsored by the IEEE Electron Devices Society as a premier conference for interconnect technology. The IITC provides a unique forum for professionals and researchers in semiconductor processing, advanced materials, equipment development, and interconnect systems to present and discuss exciting new science and technology.