A low cost micro-heater for aerosol generation applications

摘要

A low cost micro-heater for aerosol generation has been developed using thin film deposition, electroless metal plating and selective wet etching technology. The thermal and electrical behavior of micro-heater (MH) and micro-hot-plate (MHP) systems is reported. The microstructure of the MH consists of a free standing amorphous silicon membrane with a thin film micro-heater (Cr/Ni layer) on top. The heating element is fabricated by e-beam evaporation and solution based nickel plating. The metal pattern temperature reaches the boiling point of glycerol (290 ℃) and higher. A wet etched formed reservoir storage space for the aerosol source liquid can be placed alongside or underneath the hot plate. The entire MH unit is fabricated on a thin glass coverslip. This structure and the use of a plating bath and wet etch render the device remarkably low cost (less than 18￠) as compared to other silicon technology based heaters. This MH can be integrated with gas sensors to assist pre-heating to the working temperature. The chemical release cycles are well controlled and are ideally suitable for use in medical procedures, such as drug inhalation therapy.