The static and dynamic response of SU-8 electrothermal microgrippers of varying thickness

摘要

This work presents an investigation into the effect on dynamic response of SU-8 microgrippers due to varying thickness, and subsequent validation via COMSOL Multiphysics simulations and thermal camera profiling during actuation. The tweezer-like microgrippers can easily manipulate, with a high degree of control, cells and particles with diameters as small as 10 mu m, without using an impractical operating voltage or generating excessive heat.