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Fabrication of micro-pyramid arrays on PETG films by roll-to-roll hot embossing

机译:卷对卷热压印在PETG薄膜上制备微金字塔阵列

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摘要

Roll-to-roll hot embossing is a promising method for micro-structures fabrication with high throughput. Micro pyramid arrays with the average height of 65 pm and the bottom edge length of 175 pm were successfully fabricated on optical transparent poly(ethylene terephthalate-co-1,4-cylclohexylenedimethylene terephthalate) (PETG) films via roll-to-roll hot embossing. No whitening caused by crystallization happened on PETG films during embossing. The effects of roller temperature, roller speed and applied force on the replication quality of micro-pyramid arrays were investigated. According to the effects we studied, the embossing conditions can be optimized for fabrication of high micro-pyramid arrays with low defects percentage. Optical microscope images show that micro-pyramid arrays with the average height over 60 pm have good reflection performance. The PETG films with micro-pyramid arrays can be of applications in reflective films field. (C) 2016 Elsevier B.V. All rights reserved.
机译:卷对卷热压印是一种有前途的高产量微结构制造方法。通过卷对卷热压花成功地在光学透明的聚对苯二甲酸乙二醇酯-co-1,4-环己二甲苯二亚甲基对苯二甲酸乙二醇酯(PETG)薄膜上成功制作了平均金字塔高度为65 pm,底边长度为175 pm的微金字塔阵列。在压花过程中,PETG膜上没有发生结晶引起的增白。研究了辊温度,辊速度和施加力对微金字塔阵列复制质量的影响。根据我们研究的效果,可以优化压花条件,以制造具有低缺陷百分比的高微型金字塔阵列。光学显微镜图像显示平均高度超过60 pm的微金字塔阵列具有良好的反射性​​能。具有微金字塔阵列的PETG膜可用于反射膜领域。 (C)2016 Elsevier B.V.保留所有权利。

著录项

  • 来源
    《Microelectronic Engineering》 |2016年第10期|100-107|共8页
  • 作者单位

    Shanghai Jiao Tong Univ, Sch Chem & Chem Engn, Res Inst Polymer Mat, Shanghai 200240, Peoples R China;

    Shanghai Jiao Tong Univ, Sch Chem & Chem Engn, Res Inst Polymer Mat, Shanghai 200240, Peoples R China;

    Shanghai Jiao Tong Univ, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China;

    Shanghai Jiao Tong Univ, Sch Chem & Chem Engn, Res Inst Polymer Mat, Shanghai 200240, Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Roll-to-roll hot embossing; Micro-pyramid arrays; PETG films; Reflection performance;

    机译:卷对卷热压花;微型金字塔阵列;PETG膜;反射性能;

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