机译:在GaAs(001)上沉积Y2O3 / Al2O3的高温混合亚纳米层原子层提高有效介电常数
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10617, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10617, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10617, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10617, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10617, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10617, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan;
Ind Technol Res Inst, Mat & Chem Res Labs, Hsinchu 31040, Taiwan;
Ind Technol Res Inst, Mat & Chem Res Labs, Hsinchu 31040, Taiwan;
Natl Nano Device Labs, Hsinchu 30078, Taiwan;
Natl Tsing Hua Univ, Dept Phys, Hsinchu 30013, Taiwan;
Natl Taiwan Univ, Grad Inst Appl Phys, Taipei 10617, Taiwan|Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan|Natl Nano Device Labs, Hsinchu 30078, Taiwan;
Atomic layer deposition; High K; Y2O3; GaAs; MOS; Sub-nano-laminated;
机译:单晶原子层在GaAs(001)上沉积Y2O3-生长,结构和电特性
机译:以三甲基铝和水为前驱体的GaAs(001)-4×6表面沉积Al2O3的原子层生长机理
机译:原子层沉积单晶Y_2O_3 / N-GaAs(001)中的低界面阱密度和高温热稳定性
机译:Ge(001)上的四方晶相和单斜晶相的检测及其对原子层沉积La掺杂ZrO_2薄膜的介电常数的作用
机译:用于高k电介质和存储器应用的原子层沉积Al2O3和TiO2
机译:微波退火介电增强沉积原子层的Al2O3 / ZrO2 / Al2O3 MIM电容器
机译:在GaAs(001)上掺杂Y2O3外延膜的立方HfO2增强介电常数
机译:用于射频mEms电容开关的替代介电薄膜,使用原子层沉积的al2O3 / ZnO合金沉积