OUTLOOK OF MOS DEVICES INTO NEXT CENTURY

摘要

Silicon MOSFETs have achieved a great success as the primary component of LSIs for 30 years by the downsizing. However, it is predicted that the downsizing will encounter certain limit in the early period of neat century. This paper describes about the outlook of future of MOS transistors and LSIs in the neat century in terms of its predict- ed limit and possibility of further evolution.