Tip-on-tip : a novel AFM tip configuration for the electrical characterization of semiconductor devices

摘要

A novel tip configuration for atomic force microscopy (AFM) called tip-on-tip is presented. In this concept a sharp, very small tip is created on top of a large truncated pyramid. The process scheme for the fabrication of tip-on-tip is presented. It is demonstrated that very sharp metal tips can be produced in this way. Advantages of tip-on-tip when applied in semiconductor device analysis are discussed. First results concerning the transfer of the developed technology to diamond are presented.