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Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling

机译:通过电化学辅助剥离制备的AU / PDMS的柔性透明电极

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摘要

Metal grids have great potential in flexible transparent conductive electrodes (E-TCEs) due to their high conductivity and transparency. Unlike other TCEs, the sheet resistance and optical transmittance of metal grids can be independently adjusted. However, the large surface roughness resulted from thickened metal layer may increase the risk of electrical short-circuiting for optoelectronic devices. In this paper, a TCE of Au-grid embedded in polydimethylsiloxane (PDMS) has been developed by an electrochemical-assisted peeling technique. By a sacrificial etching and transfer process, a smooth surface of Au/PDMS is achieved. The fabricated Au/PDMS TCE shows a surface roughness of 15 nm, a sheet resistance of 8.03 Omega /sq., an optical transmittance of 95.04% and a figure of merit (FoM) of 910. In addition, the mechanical stability of fabricated TCE is also investigated by 10,000 cycles bending with a bending radius of 2 mm. Using the fabricated TCE, a flexible alternating-current driven electroluminescent (ACEL) device is demonstrated and evaluated, which confirms the use of Au/PDMS TCEs in optoelectronic applications.commentSuperscript/Subscript Available/comment
机译:由于它们的高导电性和透明度,金属网格具有柔性透明导电电极(E-TCES)具有很大的潜力。与其他TCE不同,可以独立地调节金属网格的薄层电阻和光学透射率。然而,由增稠的金属层产生的大表面粗糙度可能增加光电器件电气短路的风险。本文采用电化学辅助剥离技术开发了嵌入聚二甲基硅氧烷(PDMS)中的Au-栅格的TCE。通过牺牲蚀刻和转移过程,实现了AU / PDMS的光滑表面。制造的AU / PDMS TCE显示出15nm的表面粗糙度,薄层电阻为8.03Ω/ sq。,光透射率为95.04%,而且为910的优选法(FOM)。此外,制造的TCE的机械稳定性还通过弯曲半径为2毫米的10,000个弯曲来研究。使用制造的TCE,对柔性交流驱动的电致发光(ACEL)装置进行说明和评估,这证实了使用AU / PDMS TCES在光电应用中的使用。<注释>上标/下标可用

著录项

  • 来源
    《Microelectronic Engineering》 |2021年第2期|111511.1-111511.7|共7页
  • 作者单位

    Southern Univ Sci & Technol Dept Mech & Aerosp Engn Shenzhen 518055 Peoples R China;

    Southern Univ Sci & Technol Sch Microelect Shenzhen 518055 Peoples R China|Southern Univ Sci & Technol Engn Res Ctr Integrated Circuits Next Generat Com Minist Educ Shenzhen 518055 Peoples R China;

    Southern Univ Sci & Technol Dept Mech & Aerosp Engn Shenzhen 518055 Peoples R China;

    Southern Univ Sci & Technol Sch Microelect Shenzhen 518055 Peoples R China|Southern Univ Sci & Technol Engn Res Ctr Integrated Circuits Next Generat Com Minist Educ Shenzhen 518055 Peoples R China;

    Southern Univ Sci & Technol Sch Microelect Shenzhen 518055 Peoples R China|Southern Univ Sci & Technol Engn Res Ctr Integrated Circuits Next Generat Com Minist Educ Shenzhen 518055 Peoples R China;

    Southern Univ Sci & Technol Sch Microelect Shenzhen 518055 Peoples R China|Southern Univ Sci & Technol Engn Res Ctr Integrated Circuits Next Generat Com Minist Educ Shenzhen 518055 Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Transparent conductive electrode; Metal grid; Electrochemical-assisted peeling; Sheet resistance; Transmittance;

    机译:透明导电电极;金属栅格;电化学辅助剥离;薄层电阻;透射率;
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