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A thermo-activated tactile micro-actuator for displays

机译:用于显示器的热激活触觉微致动器

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摘要

In this work we report the design, the fabrication and the characterization of an innovative soft tactile micro-actuator, also called TAXEL (TActile piXEL), which is developed to be integrated in a portable tactile display for providing text content and graphical information to visually impaired people through the sense of touch. It exploits a thereto-active approach, by taking inspiration from common thermometers: the actuator is activated by the thermal deformation of an active material, namely the metallic alloy Galinstan(C), determined by heating the alloy through an underlying metallic resistor designed to work as a heater. The microfabrication of TAXELs is achieved in several steps consisting in heater fabrication, in SU8 micro chambers fabrication, in the deposition of Galinstan (R) inside and sealing by a PDMS membrane. Measurements of the TAXEL deformation have been accomplished by measuring the displacement of the PDMS sealing membrane, which is promoted by the expansion of the heated Galinstan (R) drop. These measurements have been achieved by using the Laser Doppler Vibrometer in the "topography mode" and revealed a total displacement of 50 mu m when a tension of 2.4 V is applied at taxel terminals and, according to the Joules law, a power converted from electrical energy to thermal energy of 7,2 W.
机译:在这项工作中,我们报告了一种创新的软触觉微执行器(也称为TAXEL(TActile piXEL))的设计,制造和特性,该微触觉微执行器经过开发可集成到便携式触觉显示器中,以提供文字内容和图形信息,从而实现可视化通过触觉使人受损。通过从普通温度计中汲取灵感,它采用了一种主动式方法:致动器通过一种活性材料(即金属合金Galinstan(C))的热变形来激活,该热变形是通过设计用于工作的基础金属电阻器加热合金而确定的。作为加热器。 TAXEL的微制造可以通过以下几个步骤完成:在加热器制造中,在SU8微室制造中,在内部的Galinstan(R)沉积以及通过PDMS膜密封。通过测量PDMS密封膜的位移来完成TAXEL变形的测量,该位移由加热的Galinstan(R)液滴的膨胀促进。这些测量是通过在“地形模式”下使用激光多普勒振动计完成的,当在紫杉端子上施加2.4 V的张力时,总位移为50μm,并且根据焦耳定律,功率转换为从电能到7.2 W的热能

著录项

  • 来源
    《Microelectronic Engineering 》 |2019年第1期| 6-13| 共8页
  • 作者单位

    Ist Italiano Tecnol, Ctr Biomol Nanotechnol Unile, Via Eugenio Barsanti 14, I-73010 Arnesano, LE, Italy|Univ Salento, Dipartimento Ingn Innovaz, Complesso Ecotekne,Edificio Corpo O Via Monteroni, I-73100 Lecce, Italy;

    Ist Italiano Tecnol, Ctr Biomol Nanotechnol Unile, Via Eugenio Barsanti 14, I-73010 Arnesano, LE, Italy;

    Ist Italiano Tecnol, Ctr Biomol Nanotechnol Unile, Via Eugenio Barsanti 14, I-73010 Arnesano, LE, Italy;

    Ist Italiano Tecnol, Ctr Biomol Nanotechnol Unile, Via Eugenio Barsanti 14, I-73010 Arnesano, LE, Italy|Univ Salento, Dipartimento Ingn Innovaz, Complesso Ecotekne,Edificio Corpo O Via Monteroni, I-73100 Lecce, Italy;

    Ist Italiano Tecnol, Ctr Biomol Nanotechnol Unile, Via Eugenio Barsanti 14, I-73010 Arnesano, LE, Italy;

    Ist Italiano Tecnol, Ctr Biomol Nanotechnol Unile, Via Eugenio Barsanti 14, I-73010 Arnesano, LE, Italy|Univ Salento, Dipartimento Ingn Innovaz, Complesso Ecotekne,Edificio Corpo O Via Monteroni, I-73100 Lecce, Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Tactile display; Taxel; KMPR; Electro-deposition; Galinstan (R);

    机译:触觉显示;出租车;KMPR;电沉积;Galinstan(R);

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