Product Extra!

摘要

KLA-Tencor's Klarity 1.0 automated module enables the company's defect analysis hardware to perform time-saving decision-making processes that eliminate the need for manual engineering analysis. The module is an enhancement to the Quest defect data management system, which automatically collects defect data from multiple sources throughout the fab. In contrast to manual analysis methods, the Klarity's decision-flow analysis recipes automatically perform complex analyses to quickly flag out-of-control conditions and identify defects. The rapid resolution of yield problems gives fab engineers more time to focus on other critical issues. Information: 408/875-3000. (Semicon West, San Francisco, South Hall, Booth 426; San Jose, McEnery Hall, Booth 11001)