Novellus debuts integrated copper system, signs strategic alliances with Lam, IPEC

摘要

In a move aimed directly at archcompetitor Applied Materials, Novellus Systems introduced its Damascus copper damascene production system at a press conference here in early June. The announcement followed news of a multi-company strategic alliance for copper processing, which links Novellus with CMP toolmaker IPEC and etch equipment manufacturer Lam Research and its cleaning tool division, OnTrak Systems.