Examining purification and certification strategies for high- purity C_2F_6 process gas

摘要

As the semiconductor industry shifts to using more-complex devices and finer geometries, the need grows for higher-purity process materials and gases. While manufacturing process improvements have provided the capability to consistently produce higher-purity material at higher rates, this improved purity has led to tighter specifications and the need for better analytical instrumentation and methods. Thus, developing new manufacturing and purification processes along with the associated packaging and analytical technologies is necessary to keep pace with increasingly demanding industry requirements.