'On-the-fly' ADC can help accelerate defect classification, leading to rapid corrective actions and enhanced yields. Since development cycle times have continued to shrink as outlined in the National Technology Roadmap for Semiconductors, it has become increasingly important to identify and isolate wafer defects in order to meet yield targets and maintain profitability. Real-time defect capture alone will not improve yield, however; it is necessary to characterize defects and trace them to their sources so that problems with processing tools can be corrected. The more defect information that is quickly available, the more likely it is that appropriate action will be taken expeditiously, enhancing yield and productivity.
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