Devising specifications for optimizing point-of-use gas pressure regulators

摘要

Strides in computer performance and the decreasing cost of manufacturing semiconductor wafers relative to size are the result of many small, incremental improvements in wafer design and manufacturing processes. These improvements rely, in turn, on the quality of all of the components that are used in the fab, from the environmental system to the wafer processing tools themselves. Therefore, advancements in the quality of such components, no matter how small, are important to the entire semiconductor industry because they either support or spawn other advancements. This article examines point-of-use pressure regulators and the need to develop specifications that can optimize their use and bolster the performance of the processing tools to which they are attached.