New ESH report details ways to cut fab water, energy costs

摘要

A fab can save 5 million kilowatt-hours per year by reducing ultrapure water (UPW) use by 10%. Assuming a cost of 4(1/2)cents per kilowatt-hour, that reduction translates into an annual savings of approximately $225,000. An efficient deanroom can save more than 5.4 million kilowatt-hours of energy annually, while a clean-room running at optimum efficiency can save an additional 3.6 million kilowatt-hours.