Interim edition includes no surprises, sets stage for 2005

摘要

As expected, no surprises lurk in the 2004 update of the semi-conductor industry's technological guidebook. The 14 technology working groups reviewing the document determined that the 2003 version of the International Technology Roadmap for Semiconductors (ITRS) correctly assessed the industry's challenges and technological requirements. The incremental changes made in the latest update set the stage for the complete revision of the 2005 roadmap. The update notes that critical dimension (CD) control tolerances, the timing of the introduction of the 450-mm wafer size, and the necessity of improved yield models that include new materials are among the challenges facing the industry. The document also cited the need for new high-aspect-ratio inspection systems and improved data management for yield learning.