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An Iterative Procedure for Optimizing the Performance of the Fuzzy-Neural Job Cycle Time Estimation Approach in a Wafer Fabrication Factory

机译:晶圆制造厂中模糊神经工作周期时间估计方法性能优化的迭代过程

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摘要

Estimating the cycle time of each job in a wafer fabrication factory is a critical task to every wafer manufacturer. In recent years, a number of hybrid approaches based on job classification (either preclassifkation or postdassification) for cycle time estimation have been proposed. However, the problem with these methods is that the input variables are not independent. In order to solve this problem, principal component analysis (PCA) is considered useful. In this study, a classifying fuzzy-neural approach, based on the combination of PCA, fuzzy c-means (FCM), and back propagation network (BPN), is proposed to estimate the cycle time of a job in a wafer fabrication factory. Since job classification is an important part of the proposed methodology, a new index is proposed to assess the validity of the classification of jobs. The empirical relationship between the S value and the estimation performance is also found. Finally, an iterative process is employed to deal with the outliers and to optimize the overall estimation performance. A real case is used to evaluate the effectiveness of the proposed methodology. Based on the experimental results, the estimation accuracy of the proposed methodology was significantly better than those of the existing approaches.
机译:估算晶圆制造工厂中每个作业的周期时间对于每个晶圆制造商而言都是至关重要的任务。近年来,已经提出了许多基于作业分类(预分类或后置淡化)的混合方法,用于周期时间估计。但是,这些方法的问题在于输入变量不是独立的。为了解决此问题,主成分分析(PCA)被认为是有用的。在这项研究中,基于PCA,模糊c均值(FCM)和反向传播网络(BPN)的组合,提出了一种分类模糊神经方法,以估计晶圆制造厂的作业周期。由于工作分类是所提出方法的重要组成部分,因此提出了一个新的指标来评估工作分类的有效性。还发现了S值与估计性能之间的经验关系。最后,采用迭代过程来处理离群值并优化总体估计性能。实际案例用于评估所提出方法的有效性。基于实验结果,该方法的估计精度明显优于现有方法。

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  • 来源
    《Mathematical Problems in Engineering 》 |2013年第1期| 740478.1-740478.15| 共15页
  • 作者

    Toly Chen; Yi-Chi Wang;

  • 作者单位

    Department of Industrial Engineering and Systems Management, Feng Chia University, 100 Wenhwa Road, Seatwen, Taichung 408, Taiwan;

    Department of Industrial Engineering and Systems Management, Feng Chia University, 100 Wenhwa Road, Seatwen, Taichung 408, Taiwan;

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