Structural and dielectric properties of Fe-substituted BST thin films grown by laser ablation

摘要

BST thin films are grown by pulsed laser deposition technique at different temperatures and different oxygen deposition pressures. X-ray diffraction studies confirm the perovskite phase of the films. From the epsilon'-V characteristic tunability is calculated and the films grown at lower oxygen deposition pressure is found have higher tunability which is explained in terms of stress developed in the film and oxygen vacancies formed during deposition. The epsilon'-V variation is explained in terms of Devonshire's phenomenological theory. (C) 2004 Elsevier B.V. All rights reserved.