Effect of heating rate on microstructure of (Ba0˙99Bi0˙01)TiO3 thin film prepared by sol-gel deposition process

摘要

The (Ba0˙99Bi0˙01)TiO3 ferroelectric film were successfully prepared with sol-gel deposition process. The effects of heating rate on c/a ratio and microstructure of the thin films were studied with X-ray diffractometry (XRD) and scanning electron microscopy (SEM). Calculation of c/a ratio with XRD analysis revealed that the c/a ratio of the films was increased with increasing heating rate. The SEM analysis indicated that columnar character of the film was increased with increasing heating rate.