MICROSTRUCTURE AND METAL-INSULATING TRANSITION OF VO_2 THIN FILMS

摘要

Vanadium oxide thin films were deposited from alkoxide precursors. Upon a thermal treatment under a reducing atmosphere, they led to crystalline VO_2, which exhibited the well-known metal-semiconducting transition. The shape and width of the hysteresis curve were related to the microstructure of the films and strongly depend on the preparation procedure.