Mechanism of titanium deposition on A1N surface by molten salt reaction

摘要

Titanium metallization of aluminum nitride (AlN) ceramics by molten reaction was developed. The coating thickness increased linearly with temperature and time. The deposition rate was proportional to the initial K_2TiF_6 concentration. The disproportionation of Ti~(2+) was the rate-determining step of deposition process and its activation energy was estimated to be 192.438 kJ/mol.