Microwave plasma synthesis of TiN and ZrN nanopowders

摘要

This work demonstrates that TiN and ZrN nanopowders can be prepared by microwave plasma synthesis method. The effects of flow rate of plasma forming gas, flow rate of carrier gas and feeding rate of precursor raw material to the average particle size were studied. The TiN and ZrN nanopowders were characterized by means of transmission electron microscopy (TEM) and X-ray diffraction (XRD).