A new 'fluoride' synthesis route for successive ionic layer deposition of the Zn_xZr(OH)_yF_z centre dot H_2O nanolayers

摘要

It was for the fist time shown that hydroxo-fluoride nanolayers with the general formula M_xZr(OH)_yF_z centre dot nH2O can be synthesized by the successive ionic layer deposition method using soluble complexes of metal fluorides as reagents. By an example of the Zn_xZr(OH)_yF_2 centre dot nH_2O nanolayers on silicon surfaces, the effect of pH, the reagent concentration, and the number of the deposition cycles was examined. The composition and structure of these layers were determined by X-ray photoelectron and FTIR transmission spectroscopy, X-ray diffraction, scanning electron microscopy (SEM), while the growth kinetics was evaluated by ellipsometry.