Nitridation enhancing effect of ZrO_2 on silicon powder

摘要

The nitridation behavior of silicon powder with added Zr compounds was studied in order to assess the catalytic effect of zirconium on the formation of reaction bonded silicon nitride, using high purity silicon powder and monoclinic zirconia as starting materials. Thermogravimetric analysis revealed that the addition of ZrO_2 to Si powder reduced the temperature of the main nitridation reaction, and increased the amount of silicon converted to silicon nitride at a given temperature. On the other hand, the nitridation rate at higher temperatures (1380-1400 ℃) indicated similar values for both pure Si and Si with ZrO_2 additions.