Properties of Au nanolayer sputtered on polyethyleneterephthalate

摘要

AFM, XRD, zeta (ζ) potential measurement and spectroscopic ellipsometry were used for characterization of thin (20 nm) Au films sputtered onto polyethyleneterephthalate (PET). Sputtered Au film shows significantly different surface morphology and roughness in comparison with pristine PET. From XRD measurement of 20 nm thick sputtered Au layers it was found that Au crystalizes preferentially in (111} direction with lattice parameter of a = 0.40769 nm, density of p= 19.338 g cm~(-3) and lattice stress of about 230 MPa. Higher surface conductance of Au/PET by ζ-potential measurement was found. Au layer thickness of 19.4 nm determined from spectroscopic ellipsometry was in good agreement with the AFM estimated value of 20 nm.