Micropatterning of titanium surfaces using electrochemical micromachining with an ethylene glycol electrolyte

摘要

Micropatterning of bulk titanium (Ti) surfaces is of high interest for both biomedical applications and other areas of microengineering. The techniques available for precise patterning of Ti all have intrinsic problems such as slow material removal rate, up-scaling issues or unwanted surface modifications. Electrochemical micromachining (EMM) is an effective technique for micropatterning of metal surfaces in a direct writing fashion with recent advancements having pushed the resolution into the submicron region. Although most conducting surfaces can be machined using EMM not many studies have been performed on Ti substrates. Here we present a technique utilizing a water-free electrolyte with which EMM of Ti surfaces easily can be performed. Pit and groove structures with approximately 50 urn diameter/width were fabricated at high etch rates utilizing a simple tungsten carbide tool.