X-ray Diffraction Study of Structural and Mechanical Modification Induced by Ion Beam Assisted Deposition Process of 304 L Stainless Steel Films

摘要

This study is devoted to characterize the microstructural and mechanical state of polycrystalline 304 L stainless steel (SS), deposited on Si substrate by the ion beam sputtering technique using the ion beam assisted deposition (IBAD) processes, by using X-ray diffraction method. Theconventional Sin~(2)Ψ method shows that both stress and stress-free lattice parameters are found to be decrease under the IBAD processes. The size of coherently diffracting domains D and microdistortions 〈ε ~(2)〉~(1/2) in thick filmsare obtained using the integral width (IW) methods. The measurements show that D increases and 〈ε ~(2)〉~(1/2) decreases. The texture analysis confirm the 〈110〉 texture that increases with assistance rate.