Preparation of Ba-Ti-O films by laser chemical vapor deposition

摘要

Ba-Ti-O films were prepared on Pt-coated Si substrate by laser chemical vapor deposition, and their orientations and microstructures were compared. Ba_2TiO_4, BaTiO_3, BaTi_2O_5, Ba_4Ti_(13)O_(30) and BaTi_4O_9 single-phase films were prepared at Ti to Ba molar ratio from 0.41 to 3.49. The α'-Ba_2 TiO_4 film showed (010) and (091) co-orientation with elongated, truncated columnar grains. The BaTiO_3 film was composed of triangular and hexagonal grains with slight (111) orientation. The BaTi_2O_5 film had (010) orientation and faceted columnar grains. The Ba_4Ti_(13)O_(40) film showed (100) and (012) co-orientation with shellfish-like grains. The BaTi_4O_9 film showed (010) orientation with slightly rounded faceted columnar grains. The deposition rates of Ba-Ti-O films ranged from 30 to 144 μm h~(-1).